APPLICATIONS
Semi-conductor
Niacet Anhydrous Hydrogen Chloride
Anhydrous Hydrogen Chloride (HCl) is a colorless, corrosive, toxic, nonflammable gas with a suffocating odor. Hydrogen Chloride is heavier than air and fumes strongly in moist environments. It is shipped as a liquefied gas under its own vapor pressure. Our process imparts few impurities that may impact your process, you benefit from our clean manufacturing systems.
Physical Constants and Technical information
Vapor Pressure (@21.1°C) 613psig
Molecular Weight 36.46
Specific Gravity , Gas@ 21.1°C, 1atm 1.27
Liquid Density @ Boiling Point 74.35lbs/ft³ (1191g/l)
Density, Gas @ 21.1°C, 1atm 0.94 lb/ft³ (1.51 g/l)
Specific Volume, Gas @ 21.1°C, 1atm 10.6ft³/lb (0.662l/g)
Critical Temperature 51.4°C
Critical Pressure 1197.7 psia(82.6 bar)
Toxicity
PEL/TLV 5 ppm
LC50 3120 ppm
IDLH 100 ppm
CAS# 7647-01-1 Poison Gas
DOT Shipping Labels Corrosive Gas
Applications
In the semiconductor industry, it is used extensively as a cleaning gas in Epitaxial Wafer processes, it can also be used to both etch semiconductor crystals and to purify silicon via trichlorosilane (SiHCl3).
Available Purities
We offer Hydrogen Chloride in the following purities.
Technical Grade
99.95%
In Tube Trailers, Ton Containers and Cylinders
Low impurities for technical processes
4N7
99.997%
In Ton Containers and Cylinders
For processes with slightly tighter tolerances for impurities.
5N
99.999%
In Tube Trailers, Ton Containers and Cylinders
For applications with sensitive requirements our very low moisture product works best.
These options will be available for our European customers are being added to the portfolio soon. Inquire at the time of order.
Available packaging
We offer Hydrogen Chloride in the following package sizes.
Tube Trailers 21,000lbs/9,545kgs
Ton Containers 600lbs/273kgs CGA 330 and DISS 634 manual valves
Cylinders 60lbs/27kgs CGA 330 and DISS 634 manual valves
Additional packages and valves for European customers are being added to the portfolio as well as Pneumatic valve options. Inquire at the time of order.
